Pre-vacuum Atmosphere Sintering Furnace
I. Usage
This equipment is mainly for universities, research institutes and enterprises in sintering of semiconductive ceramic substrate (MCM substrate
of electronic ceramic materials) in protective atmosphere. It is not only suitable for the sintering of electronic materials such as aluminum nitride,
but also applied to high temperature sintering of ceramic and metal materials.
II. Main Technical Parameters
1. Power: 50KW
2. Rated voltage: 380V, three phase heating
3. Rated temperature: 1900C
4. Working area size: 200×200
5. Temperature control method: thermocouple and infrared
6. Ultimate vacuum: 20Pa
7. Temperature uniformity: ±10C
III. Structure Characteristics
1. All stainless steel inner and outer layer, aluminum alloy frame, fine appearance, easy operation, export equipment. The electrode structure of
this equipment is patented products. Graphite is the heating element.
2. Carbon felt insulation, special structure is suitable for atmosphere production.
3. Loading from the bottom, flexible shaft drive, smooth lifting and free noise.
4. Direct mechanical vacuum pump, automatic operation.
5. PLC automatic control, multi-fault alarm and protection.
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